Magnetron Sputtering Coating Materials with Different Sputtering Targets

• Type: Alloy Target
• Shape: Plate
• Certification: ISO
• Transport Package: Vacuum Packaging
• Specification: Dia25.4mm, 50.8mm, 101.6mm etc
• Trademark: RongSin
• Origin: China
• Production Capacity: 500tons/Month

Product Description

Product Description

Sputtering target

A sputtering target is a material that is used to create thin films in a technique known as sputter deposition, or thin film
deposition. ... As a result, most sputtering target materials are metallic elements or alloys, although there are some ceramic targets available that create hardened thin coatings for various tools.
 

Oxides Sputtering Target
Ag2O	Al2O3	AZO
B2O3	BaxSr1-xTiO3	BaFe1219
BaO	BaTiO3	Bi2O3
Bi2Se3	BiFeO3	Ca5(PO4)3(OH)
CaO	Cd2SnO4	CdO
CoFe2O4	CoO	Co3O4
Cr2O3	Cr/SiO	CuO
Cu2O	CuAlO2	DyFeO3
Dy2O3	Er2O3	Eu2O3

 

Fe2O3	Fe3O4	GeO2	In2O3	In2O3/Ga2O3/ZnO
In2O3/ZnO	LaMnO3	LaNiO3	LaxSryMnO3	Li3PO4
LiCoO2	LiFePO4	LiMn2O4	LiNbO3	MgAl2O4
MnO	MnO2	Mo2C	MoO3	NiFe2O4
NiO	PbTiO3	PbZr0.52Ti0.48O3	Sc2O3	SnO
SnO2	SrTiO3	TeO2	V2O5	VO2
WO3	Y3Fe5O12	ZnO	ZnO+Al2O3	YSZ(ZrO2/Y2O3)
ITO	IZO	AZO	IAZO	IGZO
GZO	FTO	Y2O3	ATO(Sb2O3/SnO2)	LaAlO3

Sulfides Sputtering Target
 

Sb2S3	BaS	Bi2S3	CdS	CaS
Cr2S3	CuS	GeS	In2S3	FeS
PbS	MgS	MnS	MoS2	SiS2
TaS2	SnS2	WS2	ZnS	Ag2S
As2S3	NbS	Li2S	Li3PS4

Fluorides Sputtering Target
 

AlF3	BaF2	CaF2	CdF2	CeF3
CsF	CrF3	DyF3	ErF3	GdF3
HfF4	LiF	LaF3	MgF2	MnF2
SmF3	Na5Al3F14	NaF	SrF2	TbF3
ThF4	SnF2	TiF3	YbF3	YF3
ZnF2	ZrF4	PbF2

Tellurides Sputtering Target
 

AlTe	Sb2Te3	Bi2Te3	CdTe	Ga2Te3
GeTe	In2Te3	PbTe	MnTe	MoTe2
NbTe2	NiTe	TaTe2	SnTe	WTe2
ZnTe	Li2Te

Pure Metal Sputtering Target
 

Aluminum	Antimony	Barium	Bismuth	Boron
Cadmium	Calcium	Cerium	Chromium	Cobalt
Copper	Dysprosium	Erbium	Europium	Gadolinium
Germanium	Gold	Carbon	Hafnium	Holmium
Indium	Iridium	Iron	Lanthanum	Lead
Lithium	Lutetium	Magnesium	Manganese	Molybdenum
Neodymium	Nickel	Niobium	Palladium	Platinum
Praseodymium	Rhenium	Rhodium	Samarium	Scandium
Selenium	Silicon	Silver	Tantalum	Tellurium
Terbium	Thulium	Tin	Titanium	Tungsten
Vanadium	Ytterbium	Yttrium	Zinc	Zirconium

Alloy Targets 

AlB	AlCr	AlMg	AlSi	AlTi
AlZr	CoFe	CoFeB	CrGe	CuSe
Cu2Se	FeCrAl	FeMn	FePt	FeZr
GaSb	HfSi	InSb	NiCr	NiCrAl
NiCrSi	NiCu	NiMn	NiTi	NiV
NiZr	ScAl	TaAl	TaMo	SnZn
TiAl	TiAlV	TiAlSi	TiCo	TiN
TiW	ZnAl	ZnCu	GuInGaSe	AuGe
AuTi	AuCu	AuSn	AuNi	AgCu
SnAgCu	IrMn	IrPt	PtMn

Nitrides Sputtering Target

AlN	BN	Cr2N
HfN	NbN	Si3N4
TaN	TiN	ZrN

Carbide Sputtering Target
 

B4C	Cr3C2	HfC
Fe3C	Mo2C	NbC
SiC	TaC	TiC
WC	VC	ZrC